Numerical Simulations of Semiconductor Processes

                    David Adalsteinsson
               Lawrence Berkeley National Lab

                   Friday 14 March, 1997
                      3:20pm, JWB 333


                          Abstract


I will describe a numerical framework to simulate a range of
processes involved in the manufacturing of silicon wafers.
Such a framework can be used to better understand the
surface physics and to predict what happens during
manufacturing.

The framework is based on level set methods, and allows the
simulation of two and three dimensional structures under
complex surface laws. I will describe the problem, show
results, and talk about some of the numerical aspects
involved.

Requests for preprints and reprints to: zhu@math.utah.edu
This source can be found at http://www.math.utah.edu/research/